Semiconductor zinc oxide is a typical third-generation semiconductor material with both 3.37ev band gap and 60MeV exciton binding energy. It belongs to II-VI semiconductors. Due to its unique piezoelectric, electrical and optical memory properties, zinc oxide has a wide range of applications in sensors, conductive memory elements, laser systems and so on. At present, the effective way to improve the photoelectric properties of ZnO films is lithium doping.